Industrial Hygiene Testing and Evaluation Details
Industrial Hygiene Testing to include the following (when performed separately from a SEMI S2 evaluation):
- Preparation of Test Plan prior to physical testing submitted to client for approval.
- Use of appropriate and calibrated direct reading or integrated test equipment and method for the specific agent to be tested.
- Internal Technical Peer Review.
- An electronic copy of Industrial Hygiene Survey Report issued within 14 working days of on-site testing. Report will be suitable as a stand-alone report or for inclusion within existing or future SEMI S2 evaluation report.
Exhaust Ventilation Testing (SEMI S6 Tracer Gas Testing) to include the following:
- Preparation of Test Plan prior to physical testing for each specified exhausted enclosure to conform to SEMI S6 Guidelines for internal flammability and/or external toxicity.
- Use of appropriate and calibrated test equipment and method.
- Internal Technical Peer Review.
- An electronic copy of SEMI S6 Exhaust Ventilation Report issued within 14 working days of nn-site testing. Report will be suitable as a stand-alone report or for inclusion within existing or future SEMI S2 evaluation report.